Clean Room & Nanofabrication Facility

An Open User Facility at Boston College

Open to both Boston College and External Users, this laboratory is home to over 30 high-end micro and nanoscale instrumentation systems worth several million dollars.

Comprised of 1,500 square feet of Class 1,000 and Class 10,000 cleanroom spaces, the lab enables highly sensitive materials and devices to be fabricated free from contaminants. In addition, there is over 2,000 square feet of service and support space. The lab is supported by an air handling unit that completely cleans and renews all the air in the facility every 45 seconds.

Specs

  • 1500 sqft of class 1,000 and 10,000 clean room space
  • 2,000sqft of service and support area space
  • 10,000 CFM air handling unit with approximately 75 air changes per hour
  • Room temperature between 65-70°F
  • Relative humidity of 45-55%
  • 18.2 MegOhm deionized water
  • House nitrogen (N2) from liquid nitrogen boil off, 35-45 psi
  • Compressed Dry Air (CDA) delivery pressure 90-100 psi
  • Service corridor is monitored for low and high oxygen level conditions
  • 30+ Capital equipment systems

Safe Environment

  • Safety eyewash and safety shower inside and outside of cleanroom
  • 3 exhaust hoods for chemical work.
  • Gowning is required before entering the cleanroom to protect the environment and samples in process. Particulate-free bouffant caps coveralls, shoe covers, gloves, and safety glasses are provided.
  • Face shields, chemical resistant aprons, protective sleeves, and heavy chemical resistant gloves are provided for chemical work.
  • All high voltage equipment has at least one EMO for emergency shut down should problems arise
  • There are no highly toxic gases.

Dedicated Staff

Every user receives training from our staff. The staff is there to assist users in troubleshooting and offer support when necessary.

Why BCISCRNF

  • State of the art facility and equipment
  • Perfect for small start-up companies and colleges
  • Easy set-up for new users
  • Cost effective/affordable rates
  • One-on-one training

Laboratory


Equipment and Rates

General Internal Rates
(Boston College)
External Academic Rates
(non profit)
External Commercial
Rates
Cleanroom Use $32/hr
max $96/day
$32/hr
max $96/day
$60/hr
max $240/day
Remote Staff Assistance $100/hr $100/hr $100/hr
Quarterly Cap $5,400/user $6,000/user $7,500/user

 

 

Equipment Vendor
& Model
Internal Rates External Academic Rates External Commercial
Rates
Scanning Electron Microscope JEOL
JSM-7001F
$44/hr

$44/hr

$105/hr

EDX (on SEM) Oxford included in
SEM rate

included in
SEM rate

included in
SEM rate

Focused Ion Beam System JEOL
JIB-4500
$45/hr

$55/hr

$115/hr

Nanomanipulation and Electrical Probing
Micromanipulator
Kleindiek 
MM3A
included in
FIB rate
included in
FIB rate
included in
FIB rate
Atomic Force Microscope Park SystemsXE-70 $16/hr

$20/hr

$65/hr

Equipment Vendor
& Model
Internal Rates External Academic Rates External Commercial
Rates
Mask Aligner Kari Suss MA6 --

--

--

E-Beam Writer (on SEM) Nabity $44/hr

$44/hour

$105/hr

Resist Spinner Fume Hood

Reynolds Tech

FWS-196-SS

--

--

--

Resist Spinner (2)

Brewer Science

Cee 100

-- -- --
Resist Spinner Laurell WS-400E --

--

--

Hot Plates (2) -- -- -- --
Photoresist Stabilization System Optical Associates PL-16-100 UV -- -- --
Equipment Vendor
& Model
Internal Rates External Academic Rates External Commercial
Rates
Sputter Deposition System AJA International
Orion 8
$40/hour $40/hour $95/hr
Benchtop Sputter Deposition Anatech Hummer 6.6 $10/run $10/run $25/run
Atomic Layer Deposition Cambridge NanoTechSavannah S100 $15/hr $15/hr $50/hr
E-Beam Deposition System Kurt J. LeskerPVD-75 $35/run $40/run $75/run
Thermal Evaporator Kurt J. LeskerPVD-75 $10/hr $10/hr $45/hr
Sputter Deposition System Kurt J. LeskerPVD-75 $35/run $35/run $75/run
PE-CVD Plasma-Therm
Vesaline LL
$40/run $40/run $95/run
E-Beam/Thermal Evaporator Sharon Vacuum $35/hr $40/hr $75/hr
Electroplating System Reynolds Tech -- -- --
Atomic Layer
Deposition System
Arradiance
GemStar 
ALD System
$15/hr $15/hr $50/hr
Equipment Vendor
& Model
Internal Rates External Academic Rates External Commercial Rates
Optical Microscope
(High Power)
Olympus
BX61
-- -- --
Optical Microscope
(Low Power)
Carl Zeiss, Inc. -- -- --
Reflectometer Mission Peak Optics MP100-S -- -- --
Surface Profilometer Veeco 
Dektak 150
-- -- --
Spectroscopic Ellipsometer J.A.WoollamVertical VASE -- -- --
Equipment Vendor
& Model
Internal Rates External Academic Rates External Commercial Rates
ICP RIE Plasma-ThermVersaline LL ICP $40/hr $40/hr $95/hr
Acid Etching Fume Hood Reynolds Tech
FWS-196-4910
-- -- --
UV-Ozone Stripper Samco UV-1 -- -- --
Microwave Plasma Etch PVATePla PS-210 -- -- --
XeF2 Etch System XACTIX X-SYS-
EXP Xetch
$15/hr $20/hr $50/hr
Equipment Vendor
& Model
Internal Rates External Academic Rates External Commercial Rates
Solvent Cleaning Fume Hood Reynolds Tech
FWS-196-SS
-- -- --
Critical Point Dryer Tousimis
Autosamdri-815B
$8/run $15/run $25/run
Equipment Vendor
& Model
Internal Rates External Academic Rates External Commercial Rates
Atmospheric Furnace Lindberg/Blue M 3-Zone Tube Furnace STF55666C $15/hr $20/hr $50/hr
Oven, general purpose (2) -- -- -- --
Vacuum Oven (2) -- -- -- --
Rapid Thermal Processor Modular Process Tech 
RTP-600S
$5/run $10/run $20/run
Equipment Vendor
& Model
Internal Rates External Academic Rates External Commercial Rates
Bead Blaster Econoline Abrasive Blasting Cabinet $15/hr $15/hr $40/hr
Dicing Saw DiscoUSA
DAD3220
$16/hr* $20/hr* $65/hr*
Diamond Wheel Saw South Bay TechModel 650 -- -- --
Wire Bonder West-Bond
Model 747630E
$10/hr $15/hr $35/hr
Equipment Vendor
& Model
Internal Rates External Academic Rates External Commercial Rates
RF LCR Meter Agilent 4287A -- -- --
Probe/Test Station Cascade Microtech M150 -- -- --
Four Point Probe Station Jandel
MHMP/RMS-AR
-- -- --


Frequently Asked Questions

 

Examples of Work Being Done in the Facility

Wireless communication system via nanoscale plasmonic antennas, J. Merlo, N. Nesbit, Yitzi Calm, A. Rose, L. D’Imperio, C. Yang, J. Naughton, K. Kempa, M. J.  Naughton, Scientific Reports 6.31710 DOI: 10.1038/srep 31710 (2016).

Droplet-Tn-Seq combines microfluidics with Tn-Seq identifying complex single-cell phenotypes, D. Thibault, S. Wood, P. Jensen, T. van Opijnen, bioRxiv, DOI: 10.1101/391045 (2018).

Hydrogen bonding steers the product selectivity of electro-catalytic CO Reduction, J. Li, X. Li, C. Gunathunge, M. Waegele, PNAS, DOI: 10.1073/pnas.1900761116 (2019).

Nanocoax-based electrochemical sensor, B. Rizal, M. Archibald, T. Connolly, S. Shepard, M.J. Burns, T.C Chiles, M.J. Naughton, Analytical Chemistry, DOI: 10.1021/ac402411x (2013).


All-solution-processed micro/nanowires with electroplate welding as transparent conducting electrodes, C. Yang, J. Merlo, L. D’Imperio, A. Rose, Y. Calm, B. Han, J. Gao, G. Zhou, M. Burns, K. Kempa, M.J. Naughton, Physica Status Solidi-Rapid Research Letter. DOI: 10.1002/pssr.201900010 (2019).

Arrays of electrically-addressable, optically-transmitting 3D nanostructures on free standing, flexible polymer films, L. D’Imperio, A. McCrossan, J. Naughton, J. Merlo, Y. Calm, M. Burns, M.J. Naughton, Flexible Printed Electronics, DOI: 10.1088/2058-8585/aac8fc (2018).

Label-free capture of breast cancer cells spiked in buffy coats using carbon nanotube antibody microarrays, Farhad Khosravi, et al, Nanotechnology, DOI: 0.1088/0957-4484/27/13/13LT02 (2016).


Cuddalorepatta, G. K., van Rees, W. M., Li, H., Pantuso, D.,Mahadevan L.M. & Vlassak, J.J.," Poisson’s ratio and residual strain of freestanding ultra-thin films", Journal of the Mechanics and Physics of Solids.  https://doi.org/10.1016/j.jmps.2019.103821

Cuddalorepatta, G. K., Li, H., Pantuso, D., & Vlassak, J.J. "Measurement of the stress-strain behavior of freestanding ultra-thin films", Materialia,Vol. 9,100502, 2020.  https://doi.org/10.1016/j.mtla.2019.100502.

Cuddalorepatta, G. K., Sim, G., Li, H., Pantuso, D., & Vlassak, J.J. "Residual stress–driven test technique for freestanding ultrathin films: Elastic behavior and residual strain" Journal of Materials Research, 34(20), 3474-3482, 2019.   https://doi.org/10.1557/jmr.2019.278

 

Steve Shepard

Steve Shepard, Ph.D.
Director, Nanofabrication & Cleanroom Facility

Steve Shepard came to Boston College in August 2007 and has managed the Integrated Sciences Cleanroom since its opening in November 2007. Born and raised in Massachusetts, he received a B.S. degree in Biology from Framingham State College. After college he entered the high technology industry, working 10+ years at the Raytheon Corporation- Research Division, GTE Laboratories- Research Division, and the Adams-Russell Company- Semiconductor Center. Work included semiconductor characterization, semiconductor device fabrication R & D, integrated circuit manufacturing, and facility management. Steve then moved into academia where, for 30+ years, he worked at MIT, Harvard University, and Boston College in the areas of semiconductor and superconductor micro- and nanotechnology and cleanroom management.

Outside interests include early New England history, guitar, and running/racing.

   

   

Nanofabrication & Cleanroom Facility
Steve Shepard, Ph.D
617 552 0049
steve.shepard@bc.edu