An Open User Facility at Boston College

Open to both Boston College and External Users, this laboratory is home to over 30 high-end micro and nanoscale instrumentation systems worth several million dollars.

Comprised of 1,500 square feet of Class 1,000 and Class 10,000 cleanroom spaces, the lab enables highly sensitive materials and devices to be fabricated free from contaminants. In addition, there is over 2,000 square feet of service and support space. The lab is supported by an air handling unit that completely cleans and renews all the air in the facility every 45 seconds.

The Facility

Laboratory

Equipment and Rates

General Internal Rates
(Boston College)
External Academic Rates
(non profit)
External Commercial
Rates
Cleanroom Use $32/hr
max $96/day
$32/hr
max $96/day
$60/hr
max $240/day
Remote Staff Assistance $100/hr $100/hr $100/hr
Quarterly Cap $5,400/user $6,000/user $7,500/user

 

 

Equipment Vendor
& Model
Internal Rates External Academic Rates External Commercial
Rates
Scanning Electron Microscope JEOL
JSM-7001F
$44/hr

$44/hr

$105/hr

EDX (on SEM) Oxford included in
SEM rate

included in
SEM rate

included in
SEM rate

Focused Ion Beam System JEOL
JIB-4500
$45/hr

$55/hr

$115/hr

Nanomanipulation and Electrical Probing
Micromanipulator
Kleindiek 
MM3A
included in
FIB rate
included in
FIB rate
included in
FIB rate
Atomic Force Microscope Park SystemsXE-70 $16/hr

$20/hr

$65/hr

Equipment Vendor
& Model
Internal Rates External Academic Rates External Commercial
Rates
Mask Aligner Kari Suss MA6 --

--

--

E-Beam Writer (on SEM) Nabity $44/hr

$44/hour

$105/hr

Resist Spinner Fume Hood

Reynolds Tech

FWS-196-SS

--

--

--

Resist Spinner (2)

Brewer Science

Cee 100

-- -- --
Resist Spinner Laurell WS-400E --

--

--

Hot Plates (2) -- -- -- --
Photoresist Stabilization System Optical Associates PL-16-100 UV -- -- --
Equipment Vendor
& Model
Internal Rates External Academic Rates External Commercial
Rates
Sputter Deposition System AJA International
Orion 8
$40/hour $40/hour $95/hr
Benchtop Sputter Deposition Anatech Hummer 6.6 $10/run $10/run $25/run
Atomic Layer Deposition Cambridge NanoTechSavannah S100 $15/hr $15/hr $50/hr
E-Beam Deposition System Kurt J. LeskerPVD-75 $35/run $40/run $75/run
Thermal Evaporator Kurt J. LeskerPVD-75 $10/hr $10/hr $45/hr
Sputter Deposition System Kurt J. LeskerPVD-75 $35/run $35/run $75/run
PE-CVD Plasma-Therm
Vesaline LL
$40/run $40/run $95/run
E-Beam/Thermal Evaporator Sharon Vacuum $35/hr $40/hr $75/hr
Electroplating System Reynolds Tech -- -- --
Atomic Layer
Deposition System
Arradiance
GemStar 
ALD System
$15/hr $15/hr $50/hr
Equipment Vendor
& Model
Internal Rates External Academic Rates External Commercial Rates
Optical Microscope
(High Power)
Olympus
BX61
-- -- --
Optical Microscope
(Low Power)
Carl Zeiss, Inc. -- -- --
Reflectometer Mission Peak Optics MP100-S -- -- --
Surface Profilometer Veeco 
Dektak 150
-- -- --
Spectroscopic Ellipsometer J.A.WoollamVertical VASE -- -- --
Equipment Vendor
& Model
Internal Rates External Academic Rates External Commercial Rates
ICP RIE Plasma-ThermVersaline LL ICP $40/hr $40/hr $95/hr
Acid Etching Fume Hood Reynolds Tech
FWS-196-4910
-- -- --
UV-Ozone Stripper Samco UV-1 -- -- --
Microwave Plasma Etch PVATePla PS-210 -- -- --
XeF2 Etch System XACTIX X-SYS-
EXP Xetch
$15/hr $20/hr $50/hr
Equipment Vendor
& Model
Internal Rates External Academic Rates External Commercial Rates
Solvent Cleaning Fume Hood Reynolds Tech
FWS-196-SS
-- -- --
Critical Point Dryer Tousimis
Autosamdri-815B
$8/run $15/run $25/run
Equipment Vendor
& Model
Internal Rates External Academic Rates External Commercial Rates
Atmospheric Furnace Lindberg/Blue M 3-Zone Tube Furnace STF55666C $15/hr $20/hr $50/hr
Oven, general purpose (2) -- -- -- --
Vacuum Oven (2) -- -- -- --
Rapid Thermal Processor Modular Process Tech 
RTP-600S
$5/run $10/run $20/run
Equipment Vendor
& Model
Internal Rates External Academic Rates External Commercial Rates
Bead Blaster Econoline Abrasive Blasting Cabinet $15/hr $15/hr $40/hr
Dicing Saw DiscoUSA
DAD3220
$16/hr* $20/hr* $65/hr*
Diamond Wheel Saw South Bay TechModel 650 -- -- --
Wire Bonder West-Bond
Model 747630E
$10/hr $15/hr $35/hr
Equipment Vendor
& Model
Internal Rates External Academic Rates External Commercial Rates
RF LCR Meter Agilent 4287A -- -- --
Probe/Test Station Cascade Microtech M150 -- -- --
Four Point Probe Station Jandel
MHMP/RMS-AR
-- -- --

Frequently Asked Questions