Equipment & Rates
integrated sciences cleanroom and nanofabrication facility
general
| General | Academic Rates |
Non-Academic Rates |
|---|---|---|
| Cleanroom Use | $32/hr max $96/day |
$45/hr max $135/day |
| Remote Staff Assistance | $100/hr | $100/hr |
| Quarterly Cap | $5,400/user | $7,500/user |
Imaging and analysis
Equipment
|
Vendor & Model
|
Academic Rates
|
Non-Academic Rates
|
|---|---|---|---|
| Scanning Electron Microscope | JEOL JSM-7001F | $44/hr
|
$100/hr
|
| EDX (on SEM) | Oxford | included in
SEM rate |
included in
SEM rate |
| Focused Ion Beam System | JEOL JIB-4500 | $45/hr
|
$110/hr
|
| Nanomanipulation and Electrical Probing Micromanipulator |
Kleindiek MM3A | included in FIB rate |
included in FIB rate |
| Atomic Force Microscope | Park Systems XE-70 | $16/hr
|
$60/hr
|
lithography
Equipment
|
Vendor & Model
|
Academic Rates
|
Non-Academic Rates
|
|---|---|---|---|
| Mask Aligner | Kari Suss MA6 | --
|
--
|
| E-Beam Writer (on SEM) | Nabity | $44/hr
|
$100/hr
|
| Resist Spinner Fume Hood | Reynolds Tech FWS-196-SS | --
|
--
|
| Resist Spinner (2) | Brewer Science Cee 100 | --
|
--
|
| Resist Spinner | Laurell WS-400E | --
|
--
|
| Hot Plates (2) | --
|
--
|
--
|
| Photoresist Stabilization System | Optical Associates PL-16-100 UV | --
|
--
|
thin film deposition
| Equipment | Vendor & Model | Academic Rates | Non-Academic Rates |
|---|---|---|---|
| Sputter Deposition System | AJA International Orion 8 |
$40/hour | $90/hour |
| Benchtop Sputter Deposition | Anatech Hummer 6.6 | $10/run | $20/run |
| Atomic Layer Deposition | Cambridge NanoTech Savannah S100 | $15/hr | $45/hour |
| E-Beam Deposition System | Kurt J. Lesker PVD-75 | $35/run | $70/run |
| Thermal Evaporator | Kurt J. Lesker PVD-75 | $35/run | $70/run |
| Sputter Deposition System | Kurt J. Lesker PVD-75 | $35/run | $70/run |
| PE-CVD | Plasma-Therm Vesaline LL |
$40/run | $40/run |
| E-Beam/Thermal Evaporator | Sharon Vacuum | $35/hr | $70/hr |
| Electroplating System | Reynolds Tech | -- | -- |
| Atomic Layer Deposition System |
Arradiance GemStar ALD System |
$16/hr | $60/hr |
metrology
| Equipment | Vendor & Model | Academic Rates | Non-Academic Rates |
|---|---|---|---|
| Optical Microscope (High Power) | Olympus BX61 | -- | -- |
| Optical Microscope (Low Power) | Carl Zeiss, Inc. | -- | -- |
| Reflectometer | Mission Peak Optics MP100-S | -- | -- |
| Thin Film Stress Measurement | Toho Flexus FLX 2320-S | -- | -- |
| Surface Profilometer | Veeco Dektak 150 | -- | -- |
| Spectroscopic Ellipsometer | J.A.Woollam Vertical VASE | -- | -- |
etching
| Equipment | Vendor & Model | Academic Rates | Non-Academic Rates |
|---|---|---|---|
| ICP RIE | Plasma-Therm Versaline LL ICP | $40/hr | $90/hr |
| Acid Etching Fume Hood | Reynolds Tech FWS-196-4910 | -- | -- |
| UV-Ozone Stripper | Samco UV-1 | -- | -- |
| Microwave Plasma Etch | PVATePla PS-210 | -- | -- |
| XeF2 Etch System | XACTIX X-SYS-EXP Xetch | $15/run | $45/run |
wet process
| Equipment | Vendor & Model | Academic Rates | Non-Academic Rates |
|---|---|---|---|
| Solvent Cleaning Fume Hood | Reynolds Tech FWS-196-SS | -- | -- |
| Critical Point Dryer | Tousimis Autosamdri-815B | $8/run | $20/run |
anneal and heat treatment
| Equipment | Vendor & Model | Academic Rates | Non-Academic Rates |
|---|---|---|---|
| Oven, general purpose (2) | -- | -- | -- |
| Vacuum Oven (2) | -- | -- | -- |
| Furnace (2) | -- | -- | -- |
| Rapid Thermal Processor | Modular Process Tech RTP-600S | $5/run | $15/run |
back-end process
| Equipment | Vendor & Model | Academic Rates |
Non-Academic Rates |
|---|---|---|---|
| Dicing Saw | DiscoUSA DAD3220 | $16/hr* | $60/hr* |
| Diamond Wheel Saw | South Bay Tech Model 650 | -- | -- |
| Wire Bonder | West-Bond Model 747630E | $10/hr | $30/hr |
*no cleanroom use fee
test and measurement
| Equipment | Vendor & Model | Academic Rates | Non-Academic Rates |
|---|---|---|---|
| RF LCR Meter | Agilent 4287A | -- | -- |
| Probe/Test Station | Cascade Microtech M150 | -- | -- |
| Four Point Probe Station | Jandel MHMP/RMS-AR | -- | -- |
Additional Information
- Quarterly cap includes all equipment use, but not remote assistance or material surcharges.
- Quarters begin June 1, September 1, December 1, and March 1 of each year.
- Billing will be in quarter-hour increments.
- SEM and FIB use will be capped at 45 hours per quarter, but may be extended for special circumstances with the approval of the cleanroom staff.
- Remote staff rate is in addition to the equipment use fee, but the general cleanroom use fee does not apply.
- In addition to actual equipment time used and noted in the log books, users will be charged for all unused time reserved on the SEM and FIB booked in the reservation system except where other users have picked up the unused time.
- There is a surcharge of $3 per 10 nm of Au, Pd, and Pt deposited in the e-beam (Lesker and Sharon) and sputter (AJA and Lesker) deposition systems. Users may avoid these charges if they choose to supply their own precious materials.
- There is a surcharge of $3 per each addition 10 nm of Au or Au/Pd deposited in the
Anatech Sputter System over a base of 20 nm. - There are no fees for training by the cleanroom staff. Trainee(s) will be charged for associated general cleanroom and equipment use.
All rates are subject to change.