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Equipment & Rates

integrated sciences cleanroom and nanofabrication facility


general

General                               Academic
Rates                              
Non-Academic
Rates                              
Cleanroom Use $32/hr
max $96/day
$45/hr
max $135/day
Remote Staff Assistance $100/hr $100/hr
Quarterly Cap $5,400/user $7,500/user


Imaging and analysis

Equipment
Vendor & Model
Academic Rates
Non-Academic Rates
Scanning Electron Microscope JEOL JSM-7001F
$44/hr
$100/hr
EDX (on SEM) Oxford
included in
SEM rate
included in
SEM rate
Focused Ion Beam System JEOL JIB-4500
$45/hr
$110/hr
Nanomanipulation and
Electrical Probing
Micromanipulator
Kleindiek MM3A included in
FIB rate
included in
FIB rate
Atomic Force Microscope Park Systems XE-70
$16/hr
$60/hr


lithography

Equipment
Vendor & Model
Academic Rates
Non-Academic Rates
Mask Aligner Kari Suss MA6
--
--
E-Beam Writer (on SEM) Nabity
$44/hr
$100/hr
Resist Spinner Fume Hood Reynolds Tech FWS-196-SS
--
--
Resist Spinner (2) Brewer Science Cee 100
--
--
Resist Spinner Laurell WS-400E
--
--
Hot Plates (2)
--
--
--
Photoresist Stabilization System Optical Associates PL-16-100 UV
--
--


thin film deposition

Equipment Vendor & Model Academic Rates Non-Academic Rates
Sputter Deposition System AJA International
Orion 8
$40/hour $90/hour
Benchtop Sputter Deposition Anatech Hummer 6.6 $10/run $20/run
Atomic Layer Deposition Cambridge NanoTech Savannah S100 $15/hr $45/hour
E-Beam Deposition System Kurt J. Lesker PVD-75 $35/run $70/run
Thermal Evaporator Kurt J. Lesker PVD-75 $35/run $70/run
Sputter Deposition System Kurt J. Lesker PVD-75 $35/run $70/run
PE-CVD Plasma-Therm
Vesaline LL
$40/run $40/run
E-Beam/Thermal Evaporator Sharon Vacuum $35/hr $70/hr
Electroplating System Reynolds Tech -- --
Atomic Layer
Deposition System
Arradiance
GemStar
ALD System
$16/hr $60/hr


metrology

Equipment Vendor & Model Academic Rates Non-Academic Rates
Optical Microscope (High Power) Olympus BX61 -- --
Optical Microscope (Low Power) Carl Zeiss, Inc. -- --
Reflectometer Mission Peak Optics MP100-S -- --
Thin Film Stress Measurement Toho Flexus FLX 2320-S -- --
Surface Profilometer Veeco Dektak 150 -- --
Spectroscopic Ellipsometer J.A.Woollam Vertical VASE -- --
       


etching

Equipment Vendor & Model Academic Rates Non-Academic Rates
ICP RIE Plasma-Therm Versaline LL ICP $40/hr $90/hr
Acid Etching Fume Hood Reynolds Tech FWS-196-4910 -- --
UV-Ozone Stripper Samco UV-1 -- --
Microwave Plasma Etch PVATePla PS-210 -- --
XeF2 Etch System XACTIX X-SYS-EXP Xetch $15/run $45/run


wet process

Equipment Vendor & Model Academic Rates Non-Academic Rates
Solvent Cleaning Fume Hood Reynolds Tech FWS-196-SS -- --
Critical Point Dryer Tousimis Autosamdri-815B $8/run $20/run


anneal and heat treatment

Equipment Vendor & Model Academic Rates Non-Academic Rates
Oven, general purpose (2) -- -- --
Vacuum Oven (2) -- -- --
Furnace (2) -- -- --
Rapid Thermal Processor Modular Process Tech RTP-600S $5/run $15/run


back-end process

Equipment Vendor & Model Academic
Rates
Non-Academic Rates
Dicing Saw DiscoUSA DAD3220 $16/hr* $60/hr*
Diamond Wheel Saw South Bay Tech Model 650 -- --
Wire Bonder West-Bond Model 747630E $10/hr $30/hr

*no cleanroom use fee


test and measurement

Equipment Vendor & Model Academic Rates Non-Academic Rates
RF LCR Meter Agilent 4287A -- --
Probe/Test Station Cascade Microtech M150 -- --
Four Point Probe Station Jandel MHMP/RMS-AR -- --

 

Additional Information

  • Quarterly cap includes all equipment use, but not remote assistance or material surcharges.
  • Quarters begin June 1, September 1, December 1, and March 1 of each year.
  • Billing will be in quarter-hour increments.
  • SEM and FIB use will be capped at 45 hours per quarter, but may be extended for special circumstances with the approval of the cleanroom staff.
  • Remote staff rate is in addition to the equipment use fee, but the general cleanroom use fee does not apply.
  • In addition to actual equipment time used and noted in the log books, users will be charged for all unused time reserved on the SEM and FIB booked in the reservation system except where other users have picked up the unused time. 
  • There is a surcharge of $3 per 10 nm of Au, Pd, and Pt deposited in the e-beam (Lesker and Sharon) and sputter (AJA and Lesker) deposition systems. Users may avoid these charges if they choose to supply their own precious materials.
  • There is a surcharge of $3 per each addition 10 nm of Au or Au/Pd deposited in the
    Anatech Sputter System over a base of 20 nm.
  • There are no fees for training by the cleanroom staff. Trainee(s) will be charged for associated general cleanroom and equipment use.

All rates are subject to change.